Fabrication of well ordered low dimensional structures on clean and metal-decorated stepped Si(hhm) surfaces is discussed. The atomic structure of clean Si(557)7×7 and Si(556)7×7 surfaces fabricated using special annealing procedures and metal-decorated Ag/Si(557) and Gd/Si(557) systems has been studied using high resolution scanning tunneling microscopy and low energy electron diffraction. The investigations demonstrate feasibility of fabrication of 1D- and 2D-structures of gadolinium and silver atoms on the Si(557) surface.
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