Cobalt ferrite thin films are receiving increasing interest in applications such as magnetic sensors, microwave devices, and highdensity recording media due to their high permeability, high Curie temperature, and chemical stability. In this work, a series of Gd doped Co-Ti ferrite (Co1.1Ti0.1Gd0.04Fe1.76O4) thin films on silicon substrates by pulsed laser deposition (PLD) are studied at different deposition conditions in high vacuum of ~2x10-6Torr. The thin films are prepared by Nd:YAG laser (1064 nm) with 10 Hz repetition rate and 6 ns pulse duration. The Co1.1Ti0.1Gd0.04Fe1.76O4 thin films were prepared by PLD and followed byannealing at 300C, 500C, 700C, and 900C, for 2h in air.The thin films structural properties, and magnetic properties were investigated by X-ray diffraction (XRD), Raman spectroscopy, and Vibrating Sample Magnetometer (VSM). XRD result confirmed that the single phase of cubic inverse spinel structure of CoFe2O4at 300, 500, and 700oC with preferred orientation (311) for silicon substrates. The polycrystalline of cubic inverse spinel structure with the appearance of secondary phase was appeared at 900oC. The Raman spectra gave the peaks corresponding to the tetrahedral and octahedral groups. VSM measurements showed that enhancement of magnetization with an increase annealing temperatures.
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